Title Enabling technology for MEMS and nanodevices / edited by H. Baltes ... [and others]

Published Weinheim : Wiley-VCH ; Chichester : John Wiley, 2004

Copies

Location	Call no.	Vol.	Availability
W'PONDS	620.5 Bal/Etf		AVAILABLE

Description xii, 427 pages : illustrations ; 25 cm Series Advanced micro & nanosystems ; v. 1 Advanced micro & nanosystems ; v. 1 Bibliography Includes bibliographical references and index Subject Microelectronics. Microelectromechanical systems. Nanotechnology. Author Baltes, H. (Henry) LC no. 00002619 ISBN 352730746X hardback

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