Limit search to available items
Book Cover
Author Wasa, Kiyotaka.

Title Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
Published Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, [2004]
Online access available from:
Knovel    View Resource Record  


Description 1 online resource (xiv, 518 pages) : illustrations
Contents Thin Film Materials and Devices -- Thin Film Process -- Sputtering Phenomena -- Sputtering Systems -- Deposition of Compound Thin Films -- Structural Control of Compound Thin Films -- Microfabrication by Sputtering -- Appendices -- Index
Summary An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Cathode sputtering (Plating process)
Thin films.
Form Electronic book
Author Adachi, Hideaki.
Kitabatake, Makoto.
ISBN 0815514832 (electronic bk.)
0815519311 (electronic bk.)
9780815514831 (electronic bk.)
9780815519317 (electronic bk.)