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Title MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor
Published Bellingham, Washington : SPIE Press, 2005
©2005
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Description 1 online resource (xxi, 614 pages) : illustrations
Series SPIE Press monograph ; PM126
SPIE digital library.
SPIE monograph ; PM126
Contents Foreword / S. D. Senturia -- Preface / M. E. Motamedi -- Acknowledgments -- Chapter 1. Introduction / Manouchehr E. Motamedi -- Chapter 2. Microfabrication / Olga B. Spahn, S. Mani -- Chapter 3. Micro-optics / H. P. Herzig, E.-B. Kley, M. Cumme, L. C. Wittig -- Chapter 4. Actuation and sensing / Long Que, Yogesh B. Gianchandani -- Chapter 5. Micro-optic components, testing, and applications / Manouchehr E. Motamedi and Johannes Schwider -- Chapter 6. Fiber optic systems / Rolf Göring -- Chapter 7. Optical scanners / Tarik Bourouina, Hiroyuki Fujita, M., Gilbert Reyne, and M. Edward Motamedi -- Chapter 8. Display and imaging systems / Hakan Urey, David L. Dickensheets -- Chapter 9. Adaptive optics / Scot S. Olivier -- Chapter 10. MOEMS/MEMS CAD and simulation / Ridha Hamza, Jean Michel Karam, Philippe Nachtergaele -- Chapter 11. MEMS and MOEMS packaging / Ajay P. Malshe, John Patrick O'Connor -- Chapter 12. MOEMS and MEMS materials / William D. Cowan -- Problems and exercises -- Acronyms -- Index
Summary This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems
Notes "SPIE Digital Library."--Website
Bibliography Includes bibliographical references and index
Notes Title from PDF title page (SPIE eBooks Website, viewed 2017-04-03)
Subject Microelectromechanical systems.
Microfabrication.
Optoelectronic devices.
Form Electronic book
Author Motamedi, M. Edward, editor
Society of Photo-optical Instrumentation Engineers, publisher
ISBN 1510607870
9781510607873 (electronic)
(print)