Establishing an accurate depth-scale calibration in the top few nanometers of an ultrashallow implant profile
Author: Dowsett, M. G..  v. 65  no. 11,  Date: 2002
ISSN:  0163-1829,  EISSN:  1095-3795  DOI:  10.1103/PhysRevB.65.113412 
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