Establishing an accurate depth-scale calibration in the top few nanometers of an ultrashallow implant profile
Author:
Dowsett,
M. G..
v.
65
no.
11,
Date:
2002
ISSN:
0163-1829,
EISSN:
1095-3795
DOI:
10.1103/PhysRevB.65.113412
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