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Title Design and manufacturing of active microsystems / Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, Editors
Published Berlin ; Heidelberg ; New York : Springer, [2011]
Online access available from:
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Description 1 online resource (xii, 444 pages) : color illustrations
Series Microtechnology and MEMS
Microtechnology and MEMS.
Contents pt. 1. Design and construction -- pt. 2. Guiding and measuring in active microsystems -- pt. 3. Manufacturing and fabrication -- pt. 4. Microassembly -- pt. 5. Industrial applications
Summary This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Microtechnology.
Form Electronic book
Author Büttgenbach, S. (Stephanus), 1945-
Burisch, Arne.
Hesselbach, Jürgen.
ISBN 3642129021
364212903X (electronic bk.)
9783642129032 (electronic bk.)
(hard cover ; alk. paper)