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Title Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor
Published Philadelphia, PA : ASTM, [1989]
Online access available from:
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Description 1 online resource
Series STP ; 990
ASTM special technical publication ; 990
Notes "ASTM publication code number (PCN) 04-990000-46"--Title page verso
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
Bibliography Includes bibliographical references and indexes
Subject Semiconductors -- Design and construction -- Congresses.
Genre/Form Conference papers and proceedings.
Form Electronic book
Author Gupta, D. C. (Dinesh C.)
ASTM Committee F-1 on Electronics.
ASTM International.
Semiconductor Equipment and Materials Institute.
Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.)
ISBN 0803112734