| Description |
1 online resource (521 pages) : illustrations |
| Contents |
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I -- Wafer Planarization and Bonding -- Enabling Technologies II -- Contamination Control -- Device Fabrication -- An Example |
| Summary |
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Microelectromechanical systems.
|
|
Micro-Electrical-Mechanical Systems
|
|
Microelectromechanical systems
|
| Form |
Electronic book
|
| Author |
Saile, Volker, author
|
|
Leuthold, Jürg, author
|
| ISBN |
9783662443958 |
|
3662443953 |
|
3662443945 |
|
9783662443941 |
|
