| Description |
1 online resource (231) : illustrations |
| Contents |
Cover ; Half Title ; Title ; Copyright ; Contents; Foreword; Preface; Authors; Chapter 1 Forming Directed Fluxes of Low-Temperature Plasma with High-Voltage Gas Discharge outside the Electrode Gap; 1.1 Overview of Devices Used for Generating Low-Temperature High-Voltage Gas-Discharge Plasma; 1.2 Features of Low-Temperature Off-Electrode Plasma Generated by High-Voltage Gas Discharge; 1.3 Design Changes to the High-Voltage Gas- Discharge Device; 1.4 New Devices for Generating Directed Fluxes of Low-Temperature Off-Electrode Plasma; 1.4.1 Multibeam Gas-Discharge Plasma Generator |
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1.4.2 Gas-Discharge Plasma Focuser1.5 Chapter Summary; Chapter 2 Methods for Quickly Measuring Surface Cleanliness; 2.1 Overview of Methods for Quickly Measuring Surface Cleanliness; 2.1.1 Method of Frustrated Multiple Internal Reflection Spectroscopy; 2.1.2 Method of Measuring the Volta Potential; 2.1.3 Methods for Evaluating Cleaning Efficiency Based on Wettability of the Substrate Surface; 2.1.4 Tribometric Method; 2.2 Design Changes to the Tribometer; 2.3 Operating Regimes and Parameters of the Tribometer; 2.4 Determining the Evaluation Criterion of a Technologically Clean Surface |
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2.5 Tribometric Effect of the Substrate-Probe on the Structure of the Test Surface2.6 Measuring Surface Cleanliness with the Tribometric Method; 2.7 A Cleanliness Analyzer Based on Analysis of Drop Behavior; 2.8 Evaluating the Cleanliness of a Substrate from the Dynamic State of a Liquid Drop Deposited on Its Surface; 2.8.1 Description of the Experimental Method; 2.8.1.1 Sample Preparation; 2.8.2 Description of the Experimental Procedure; 2.9 Specifications of the Micro- and Nanoroughness Analyzer; 2.10 Design Changes to the Micro- and Nanoroughness Analyzer |
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2.10.1 Requirements for the Automatic Dispenser2.10.2 Compatibility of the Pump's Control Module and the Analyzer's Software; 2.10.3 Overview of the Operation of the Modified Analyzer; 2.11 Chapter Summary; Chapter 3 Increasing the Degree of Surface Cleanliness with Low-Temperature Off-Electrode Plasma; 3.1 Overview of Methods for Surface Cleaning; 3.1.1 Chemical Cleaning; 3.1.2 Laser Cleaning; 3.1.3 Low-Temperature Plasma Cleaning; 3.2 Formation Mechanisms of Surface Properties; 3.3 Molecular Structure Analysis of the Organic Contaminant |
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3.4 Preparing Initial Samples with a Given Degree of Contamination3.5 Analysis of Plasma Particles Impinging on the Surface Being Treated; 3.6 Mechanism of Surface Cleaning with Directed Fluxes of Low-Temperature Off-Electrode Plasma; 3.6.1 Cleaning Mechanism; 3.6.2 Cleaning Model: Primary Expressions; 3.7 Experimental Investigation into the Relationship between the Degree of Surface Cleanliness and Physical Plasma Parameters; 3.8 Procedure for Final Surface Cleaning with Off-ƯElectrode Plasma; 3.9 Chapter Summary |
| Summary |
"This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed."--Provided by publisher |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Optical materials -- Microstructure
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Low temperature plasmas.
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TECHNOLOGY & ENGINEERING -- Mechanical.
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Low temperature plasmas
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| Genre/Form |
handbooks.
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Handbooks and manuals.
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Guides et manuels.
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| Form |
Electronic book
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| Author |
Kolpakov, Vsevolod A., author
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| ISBN |
1315279924 |
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9781315279923 |
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9781315279916 |
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1315279916 |
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9781315279909 |
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1315279908 |
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9781315279930 |
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1315279932 |
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