Title Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors

Published Philadelphia, PA : American Society for Testing and Materials, [1987] ©1987

Online access available from: ASTM Digital Library    View Resource Record

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Description 1 online resource Series ASTM special technical publication ; 960 ASTM special technical publication ; 960 Notes "ASTM publication code number (PCN) 04-960000-46." Papers presented at the Fourth International Symposium on Semiconductor Processing Bibliography Includes bibliographical references and indexes Notes English Subject Semiconductor industry -- Congresses. Semiconductors -- Design and construction -- Congresses. Genre/Form Conference papers and proceedings. Form Electronic book Author Gupta, D. C. (Dinesh C.) Langer, Paul H. ASTM Committee F-1 on Electronics. ASTM International. Symposium on Semiconductor Processing (4th : 1986 : San Jose, Calif.) ISBN 0803104596 0803150210 9780803104594 9780803150218

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