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Author
Liu, Chang, Ph.D.
Title
Foundations of MEMS / Chang Liu
Published
Upper Saddle River, NJ : Pearson Prentice Hall, [2006]
©2006
Copies
Location
Call no.
Vol.
Availability
W'PONDS
621.3 Liu/Fom
AVAILABLE
Description
xxii, 530 pages : illustrations ; 25 cm
Bibliography
Includes bibliographical references and index
Subject
Microelectromechanical systems.
LC no.
2005048932
ISBN
0131472860
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