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Book Cover
E-book
Author Ito, Hiroshi, 1946-

Title Microlithography/molecular imprinting / with contributions by H. Ito, J.D. Marty, M. Mauzak
Published Berlin ; New York : Springer, [2005]
©2005
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Description 1 online resource (vi, 276 pages) : illustrations
Series Advances in polymer science, 1436-5030 ; 172
Advances in polymer science ; 172. 0065-3195
Contents Molecular imprinting : state of the art and perspectives / J.D. Marty, M. Mauzac -- Chemical amplification resists for microlithography / H. Ito
Bibliography Includes bibliographical references and indexes
Notes Print version record
Subject Imprinted polymers.
Microlithography.
Molecular imprinting.
Form Electronic book
Author Marty, J. D. (Jean Daniel)
Mauzac, M. (Monique)
LC no. 2004115719
ISBN 3540218629 (print)
3540315578 (electronic bk.)
9783540218623 (print)
9783540315575 (electronic bk.)