Intro; Diffusion in High-Tech Materials; Preface; Table of Contents; Diffusion and Point Defects in Elemental Semiconductors; Diffusion and Defect Phenomena in III-V Semiconductors and their Investigation by Transmission Electron Microscopy; A Mystery of ""Sluggish Diffusion"" in High-Entropy Alloys: The Truth or a Myth?; On the Self -- and Impurity Diffusion in High Entropy Alloys; Role of Atomic Transport Kinetic on Nano-Film Solid State Growth; Keyword Index; Author Index
