| Description |
1 online resource (xii, 500 pages) : illustrations |
| Contents |
Microsystern Technology; Content; 1 General Introduction to Microstructure Technology; 2 The Parallels to Microelectronics; 3 The Physical and Chemical Basics in Microtechnology; 4 Basic Technologies in MEMS; 5 Lithography; 6 Silicon Microsystem Technology; 7 The LIGA Process; 8 Alternative Processes of Microstructuring; 9 Packaging and Interconnecting Techniques (PIT); 10 System Technology; Literatur |
| Summary |
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating |
| Bibliography |
Includes bibliographical references (pages 465-483) and index |
| Notes |
Print version record |
| Subject |
Microelectronics.
|
|
Engineering.
|
|
Nanotechnology.
|
|
Technology.
|
| Form |
Electronic book
|
| Author |
Mohr, J. (Jürgen)
|
|
Paul, Oliver.
|
|
Wiley InterScience (Online service)
|
| ISBN |
0470035226 |
|
3527613005 |
|
3527613013 (electronic bk.) |
|
9783527613007 |
|
9783527613014 (electronic bk.) |
|
