Title Laser precision microfabrication / Koji Sugioka, Michel Meunier, Alberto Piqué, editors

Published Heidelberg ; New York : Springer-Verlag, [2010] ©2010

Online access available from: Springer eBooks    View Resource Record

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Description 1 online resource (xvi, 344 pages) : illustrations (some color) Series Springer series in materials science ; 135 Springer series in materials science ; 135 Bibliography Includes bibliographical references and index Notes Print version record Subject Lasers -- Industrial applications. Microfabrication. Form Electronic book Author Sugioka, Kōji. Meunier, Michel, 1956- Piqué, Alberto. LC no. 2010931868 ISBN 9783642105234 3642105238

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