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Book Cover
Author Doll, Joseph C., author

Title Piezoresistor design and applications / Joseph C. Doll, Beth L. Pruitt
Published New York, NY : Springer, 2013
Online access available from:
Springer eBooks    View Resource Record  


Description 1 online resource (xi, 245 pages) : illustrations (some color)
Series Microsystems and nanosystems
Microsystems and nanosystems.
Contents Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods
Summary This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators
Bibliography Includes bibliographical references
Notes Online resource; title from PDF title page (SpringerLink, viewed November 4, 2013)
Subject Piezoelectric devices -- Design and construction.
Electric resistors.
Microelectromechanical systems -- Design and construction.
Form Electronic book
Author Pruitt, Beth, author
ISBN 1461485169
1461485177 (electronic bk.)
9781461485179 (electronic bk.)