Title Piezoresistor design and applications / Joseph C. Doll, Beth L. Pruitt

Published New York, NY : Springer, 2013

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Description 1 online resource (xi, 245 pages) : illustrations (some color) Series Microsystems and nanosystems Microsystems and nanosystems. Contents 880-01 Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods 880-01/(S Machine generated contents note: 1. Introduction -- 1.1. Early Piezoresistor History -- 1.2. Device and Technology Timeline -- 1.2.1. Strain Gauges -- 1.2.2. Pressure Sensors -- 1.2.3. Cantilever Beams -- 1.2.4. Inertial Sensing -- 1.2.5. Resonators -- 1.2.6. Shear Stress Sensing -- 1.3. Summary and Roadmap -- 2. Piezoresistance Fundamentals -- 2.1. Notation Fundamentals -- 2.1.1. Crystal Structure -- 2.1.2. Stress, Strain and Tensors -- 2.2. Piezoresistivity -- 2.2.1. Crystallographic Orientation -- 2.2.2. Piezoresistance Factor -- 2.2.3. Nonlinearity -- 2.2.4. Theoretical Models -- 2.3. Signal Conditioning -- 2.3.1. Process Variation and Temperature Compensation -- 2.3.2. Heterodyne Biasing -- 2.4. Summary -- 3. Sensitivity, Noise and Resolution -- 3.1. Noise -- 3.1.1. Brief Introduction to Noise -- 3.1.2. Johnson Noise -- 3.1.3. 1/f Noise -- 3.1.4. Amplifier Noise -- 3.1.5. Thermomechanical Noise -- 3.1.6. Noise Summary -- 3.2. Sensitivity -- 3.2.1. Resistance Factor (γ) -- 3.2.2. Sensitivity Factor (β) -- 3.2.3. Transverse Loading Factor (φ) -- 3.3. Resolution Example -- 3.4. Summary -- 4. Fabrication and Process Modeling -- 4.1. Model Assumptions -- 4.2. Concentration Limits -- 4.3. Predeposition -- 4.4. Ion Implantation -- 4.5. Epitaxy -- 4.6. Polysilicon -- 4.7. Electrical Modeling -- 4.8. Experimental Validation Techniques -- 4.9. Practical Notes -- 4.9.1. Wafer Selection -- 4.9.2. Dopant-Induced Lattice Strain -- 4.9.3. Piezoresistor Surface Damage -- 4.9.4. Lateral Dopant Diffusion -- 4.9.5. Excess Electrical Resistance -- 4.10. Summary -- 5. Temperature Effects -- 5.1. Temperature Coefficient of Sensitivity -- 5.2. Temperature Coefficient of Resistance -- 5.3. Piezoresistor Self-Heating -- 5.3.1. Qualitative Example -- 5.3.2. Thermal Conductivity of Typical Materials -- 5.3.3. Heat Transfer Fundamentals -- 5.3.4. Convective Heat Transfer -- 5.3.5. Example Experimental and Modeling Results -- 5.3.6. Analytical Temperature Approximations -- 5.4. Power Dissipation and Sensor Resolution -- 5.5. Summary -- 6. Design Optimization -- 6.1. Optimization Fundamentals -- 6.2. Analytical Optimization -- 6.3. Numerical Optimization -- 6.4. Example: Fabrication Process Selection -- 6.4.1. Problem Definition -- 6.4.2. Dopant Concentration -- 6.4.3. Dopant Type -- 6.4.4. Fabrication Method -- 6.5. Final Thoughts on Design -- 6.6. Summary -- 7. Alternative Materials and Transduction Methods -- 7.1. Alternative Piezoresistive Materials -- 7.1.1. Silicon Carbide -- 7.1.2. Diamond -- 7.1.3. Nanotubes and Nanowires -- 7.1.4. Metals -- 7.2. Alternative Transduction Mechanisms -- 7.2.1. Optical -- 7.2.2. Capacitive -- 7.2.3. Piezoelectric -- 7.2.4. Pseudo-Hall and Piezojunction Effects -- 7.3. Summary Summary This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators Bibliography Includes bibliographical references Notes English Online resource; title from PDF title page (SpringerLink, viewed November 4, 2013) Subject Piezoelectric devices -- Design and construction Electric resistors. Microelectromechanical systems -- Design and construction TECHNOLOGY & ENGINEERING -- Mechanical. Ingénierie. Electric resistors Microelectromechanical systems -- Design and construction Piezoelectric devices -- Design and construction Form Electronic book Author Pruitt, Beth, author. ISBN 9781461485179 1461485177 1461485169 9781461485162

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