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E-book

Title Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell
Published Oxford ; New York : Oxford University Press, 2011

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Description 1 online resource
Series Nanomanufacturing series ; v. 1
Nanomanufacturing series ; v. 1
Contents Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment
Summary Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr
Notes English
Print version record
Subject Nanostructured materials.
Nanotechnology.
Electron beams -- Industrial applications.
Ion bombardment -- Industrial applications.
Nanostructures
Nanotechnology
TECHNOLOGY & ENGINEERING -- Material Science.
Electron beams -- Industrial applications
Ion bombardment -- Industrial applications
Nanostructured materials
Nanotechnology
Form Electronic book
Author Utke, Ivo
Moshkalev, Stanislav
Russell, Phillip, 1955-
LC no. 2011028174
ISBN 9780199920990
0199920990
1280593504
9781280593505
9786613623331
6613623334