Title Nanofabrication : principles to laboratory practice / Andrew Sarangan

Published Boca Raton : CRC Press, Taylor & Francis Group, [2017] ©2017

Click on the following:
ProQuest Ebook Central

Copies

Description 1 online resource : text file, PDF Series Optical sciences and applications of light Optical sciences and applications of light. Contents Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication Bibliography Includes bibliographical references and index Subject Nanolithography. Nanostructured materials -- Design and construction Semiconductors -- Etching. Nanoelectronics -- Experiments Nanolithography Semiconductors -- Etching Genre/Form handbooks. Handbooks and manuals. Guides et manuels. Form Electronic book ISBN 9781315370514 1315370514 1498725597 9781498725590

  Permalink