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Title Characterization in silicon processing / editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick
Published Boston : Butterworth-Heinemann ; Greenwich : Manning, [1993]
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Description 1 online resource (xiii, 240 pages) : illustrations
Series Materials characterization series
Materials characterization series.
Summary This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems
Analysis Silicon
Bibliography Includes bibliographical references and index
Notes Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. MiAaHDL
Print version record
Subject Electric conductors.
Semiconductor films.
Surface chemistry.
Form Electronic book
Author Strausser, Yale.
LC no. 93022784
ISBN 0080523420 (electronic bk.)
1591245257 (electronic bk.)
9780080523422 (electronic bk.)
9781591245254 (electronic bk.)