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Authors (Last name first) (1-2 of 2)
Westwood, William D. (William Dickson), 1937-
1
1990
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Park Ridge, N.J., U.S.A. : Noyes Publications, [1990]
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621.044 Ros/Hop
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2
1990
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
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