| Description |
1 online resource |
| Contents |
Intro -- Preface -- Book Organization -- References -- Acknowledgments -- Contents -- Acronyms -- 1 Introduction to Atomic Force Microscopy -- 1.1 Introduction -- 1.2 Overview of Microscopy -- 1.2.1 Electromagnetic-Radiation-Based Microscopy -- 1.2.2 Electron-Based Microscopy -- 1.2.3 Probe-Based Microscopy -- 1.3 Atomic Force Microscope Overview -- 1.3.1 Importance of AFM Instrumentation -- 1.3.2 AFM Imaging Capabilities -- 1.3.3 AFM Components -- 1.4 AFM Operation Modes -- 1.4.1 Contact Modes -- 1.4.2 Dynamic Modes -- 1.4.3 Jumping Modes -- 1.4.4 Hybrid Modes -- 1.5 AFM Experiment Procedure |
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1.5.1 Sample Preparation -- 1.5.2 Equipment Calibration -- 1.5.3 Experimental Setup -- 1.5.4 Controller Parameter Tuning -- 1.5.5 Analysis and Visualization -- 1.6 Summary -- Problems -- References -- 2 Nanoscale Force and Displacement Sensing -- 2.1 Introduction -- 2.2 High-Precision Sensor Design -- 2.2.1 General Sensing Principles -- 2.2.2 Nanoscale Force and Motion Sensors -- 2.2.3 Sensor Performance Characterization -- 2.3 Motion Sensors Using Impedance-Based Principles -- 2.3.1 Resistive Strain Gauge -- 2.3.2 Piezoresistive Sensor -- 2.3.3 Capacitive Sensor |
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2.4 Motion Sensors Using Non-Impedance Principles -- 2.4.1 Piezoelectric Sensor -- 2.4.2 Laser Interferometer -- 2.4.3 Broader Range of Sensors -- 2.5 Sensor Application Examples -- 2.6 Summary -- Problems -- References -- 3 Cantilever Mechanics and Deflection Sensing -- 3.1 Introduction -- 3.2 Cantilever Mechanics -- 3.2.1 Moment Diagram -- 3.2.2 Normal Stress -- 3.2.3 Moment Curvature Equation -- 3.2.4 Beam Transverse Vibration Dynamics -- 3.2.5 AFM Probe Tip Mass -- 3.2.6 Damping Coefficient -- 3.2.7 Longitudinal Tip Friction Force -- 3.2.8 Transverse Tip Friction Force |
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3.3 External AFM Probe Sensing -- 3.3.1 Optical Beam Deflection Sensing -- 3.3.2 Interferometry Sensing -- 3.3.3 Astigmatic Sensing -- 3.4 Embedded AFM Probe Sensing -- 3.4.1 Piezoresistive Sensing -- 3.4.2 Piezoelectric Sensing -- 3.4.3 Optomechanical Sensing -- 3.5 Summary -- Problems -- References -- 4 Nanoscale Actuation and Active AFM Probe Design Examples -- 4.1 Introduction -- 4.2 Overview of Micro-/Nano-Actuation Methods -- 4.3 External AFM Probe Actuation -- 4.3.1 Piezoacoustic Actuation -- 4.3.2 Electromagnetic Actuation -- 4.3.3 Electrostatic Actuation -- 4.3.4 Photothermal Actuation |
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4.4 Embedded AFM Probe Actuation -- 4.4.1 Electrothermal Actuation -- 4.4.2 Piezoelectric Actuation -- 4.5 Sensing and Actuation Principle Summary -- 4.6 Active Probe Design Examples -- 4.6.1 Tuning Fork Probe -- 4.6.2 Akiyama Probe -- 4.6.3 Piezoelectric Active Probe -- 4.6.4 Piezoresistive Thermomechanical Bimorph Probe -- 4.6.5 MEMS On-Chip AFM Probe with Scanner -- 4.7 Summary -- Problems -- References -- 5 Nanofabrication of AFM Cantilever Probes -- 5.1 Introduction -- 5.2 Micro-/Nanofabrication Overview -- 5.3 Materials and Properties -- 5.3.1 Silicon Properties -- 5.3.2 Silicon Wafer |
| Summary |
From a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, system identification, signal processing, dynamic system modeling, controller. With a solid theoretical foundation, practical examples are provided for AFM subsystem level design on nano-positioning system, cantilever probe, control system and system integration. This book emphasizes novel development of active cantilever probes with embedded transducers, which enables new AFM capabilities for advanced applications. Full design details of a low-cost educational AFM and a Scale Model Interactive Learning Extended Reality (SMILER) toolkit are provided, which helps instructors to make use of this book for curriculum development. This book aims to empower AFM users with deeper understanding of the instrument to extend AFM functionalities for advanced state-of-the-art research studies. Going beyond AFM, materials presented in this book are widely applicable to precision mechatronic system design covered in many upper-level graduate courses in mechanical and electrical engineering to cultivate next generation instrumentalists. Presents the instrument design details of atomic force microscopy with focus on active cantilever probes; Includes examples and exercises to boost understanding of AFM subsystem design, fabrication and integration; Imparts a hands-on curriculum for precision mechatronics and instrumentation with AFM and digital twin simulators |
| Notes |
Online resource; title from PDF title page (SpringerLink, viewed February 26, 2024) |
| Subject |
Atomic force microscopy.
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| Form |
Electronic book
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| Author |
Rangelow, Ivo W
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Youcef-Toumi, Kamal.
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| ISBN |
9783031442339 |
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3031442334 |
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