Title Advanced micro-device engineering VI : selected, peer reviewed papers from the 6th International Conference on Advanced Micro-Device Engineering (AMDE 2014), December 5, 2014, Kiryu, Japan / edited by Ken-ichi Kasuya

Published Pfaffikon, Switzerland : Trans Tech Publications Ltd., [2016] Pfaffikon, Switzerland ; Enfield, NH USA : Trans Tech Publications Ltd., [2016] ©2016

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Description 1 online resource (viii, 180 pages) : illustrations Series Key Engineering Materials, 1013-9826 ; volume 698 Key engineering materials ; v. 698. Summary This special issue is the proceedings of the 6th International Conference on Advanced Micro-Device Engineering (AMDE 2014) organized by the Human Resource Cultivation Center, Gunma University, held on 5 December 2014 in Kiryu, Japan. Scopes of this proceedings are advanced materials, nanomaterials and technologies, electronics, microelectronics, photonics, biomedical engineering and some technologies of measurements in engineering. Materials Science, Nanomaterials, Nanotechnologies, Microelectronics, Electronics, Photonics, Measurement, Biomedical Engineering Materials Science Bibliography Includes bibliographical references and indexes Notes Print version record Subject Nanotechnology -- Research -- Congresses Microelectromechanical systems -- Research -- Congresses Miniature electronic equipment -- Technological innovations -- Congresses Microelectronics -- Technological innovations -- Congresses Mechatronics -- Technological innovations -- Congresses TECHNOLOGY & ENGINEERING -- Engineering (General) TECHNOLOGY & ENGINEERING -- Reference. Nanotechnology -- Research Microelectronics -- Technological innovations Nanotechnology Genre/Form Conference papers and proceedings Form Electronic book Author Kasuya, Ken-ichi (Of Gunma University), editor. ISBN 9783035701869 3035701865

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