""Molecular Beam Epitaxy""""Chemical Vapor Deposition Processes""; ""Microwave Electron Cyclotron Resonance Plasmas""; ""Ion Beams""; ""Energy Beams""; ""Laser Beams""; ""Electron Beams""; ""X-Ray Lithography""; ""Microwave Beams""; ""REFERENCES""; ""4 BEAM APPLICATIONS IN MICROELECTRONICS ""; ""BEAM APPLICATIONS IN SEMICONDUCTOR DEVICE MANUFACTURE""; ""Silicon Integrated Circuits""; ""Beam Technologies For Materials Deposition""; ""Beam Technologies For Patterning""; ""Beam Technologies For Etching""; ""BEAM TECHNOLOGIES FOR COMPOUND SEMICONDUCTOR ICS""
""Beam Technologies For Materials Deposition""""Beam Technologies For Heating""; ""OPTOELECTRONICS""; ""REFERENCES""; ""5 BEAM APPLICATIONS IN ENGINEERED MATERIALS""; ""COATINGS""; ""Diamond, Diamond-Like Carbon, And Cubic Boron Nitride Coatings""; ""SURFACE MODIFICATION""; ""APPLICATIONS OF LASERS TO MATERIALS FORMING""; ""Shaping And Removal""; ""Desktop Deposition""; ""Joining""; ""POWDER PREPARATION""; ""COMPOSITES FABRICATION""; ""Fiber And Whisker Preparation""; ""Metal-Matrix Composites Fabrication""; ""Ceramic-Matrix Composites Fabrication""; ""NANOPHASE MATERIALS""
""OPTICAL SURFACES AND DEVICES""""POLYMERS""; ""MATERIALS FOR ENERGY PRODUCTION""; ""BIOIMPLANT DEVICES""; ""REFERENCES""; ""6 INTEGRATED PROCESSING ""; ""INTEGRATED PROCESSING IN MICROELECTRONICS""; ""Integrated Processing For Integrated Circuits""; ""Traditional Integrated Circuit Processing Techniques""; ""Advances Toward Integrated Processing""; ""Integrated Processing Tools""; ""Applications For Integrated Processing Tools""; ""INTEGRATED PROCESSING FOR METALS AND CERAMICS""; ""Architectural Glass Coatings""; ""In-Line Dry Coating Process For Stainless Steel Sheet""
""Mechanical Fabrication""""REFERENCES""; ""7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION ""; ""REFERENCE""; ""APPENDIX A ACRONYMS AND ABBREVIATIONS""; ""APPENDIX B BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS ""
