Title Database needs for modeling and simulation of plasma processing / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council

Published Washington, D.C. : National Academy Press, 1996

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Description 1 online resource (64 pages) Series The compass series Compass series (Washington, D.C.) Analysis Andre fag (naturvidenskab og teknik) Andre fag Bibliography Includes bibliographical references Notes Print version record Subject Semiconductors -- Design and construction -- Congresses Plasma engineering -- Databases -- Congresses Plasma engineering -- Computer simulation -- Congresses SCIENCE -- Physics -- Electricity. Plasma engineering -- Computer simulation. Semiconducteurs -- Conception et construction. Plasmas, Technique des -- Bases de donnees. Plasmas, Technique des -- Simulation par ordinateur. Semiconductors -- Design and construction. Plasma engineering -- Databases. Plasma engineering -- Computer simulation Semiconductors -- Design and construction Genre/Form Electronic books Conference papers and proceedings Form Electronic book Author National Research Council (U.S.). Panel on Database Needs in Plasma Processing. ISBN 0585084548 9780585084541

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