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Subjects (1-9 of 9)
Semiconductors -- Etching.
1
E-book
2009

Advanced processes for 193-nm immersion lithography


Wei, Yayi.



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Electronic Resources
2
E-book
2020

The chemical history of lithography


Okoroanyanwu, Uzodinma, author
Second edition
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2020

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Electronic Resources
3
E-book
2014

Dry etching technology for semiconductors


Nojiri, Kazuo, author

Cham : Springer, [2014]

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4
Book
1990

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions




Park Ridge, N.J., U.S.A. : Noyes Publications, [1990]

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 W'PONDS  621.044 Ros/Hop  AVAILABLE
5
E-book
1990

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions






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Electronic Resources
6
E-book
1999

Lithography process control


Levinson, Harry J.



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7
E-book
2017

Nanofabrication : principles to laboratory practice


Sarangan, Andrew, author

Boca Raton : CRC Press, Taylor & Francis Group, [2017]

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Electronic Resources
8
E-book
2010

Optical lithography : here is why


Lin, Burn Jeng, 1942-



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Electronic Resources
9
E-book
1995

Plasma processing and processing science






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