Book Cover
E-book
Author Bahreyni, Behraad.

Title Fabrication and design of resonant microdevices / Behraad Bahreyni
Published Norwich, NY : W. Andrew Inc., ©2008

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Description 1 online resource (xiii, 181 pages) : illustrations
Series Micro & nano technologies ; 3
Micro & nano technologies ; 3.
Contents Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications
Summary This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Bibliography Includes bibliographical references and index
Notes English
Print version record
Subject Microelectromechanical systems -- Design and construction
Microfabrication.
Resonance.
resonance (acoustics concept)
TECHNOLOGY & ENGINEERING -- Mechanical.
Microelectromechanical systems -- Design and construction
Microfabrication
Resonance
Form Electronic book
ISBN 9780815515777
0815515774
9780815517115
0815517114
9780080947570
0080947573
1282252984
9781282252981
1282552635
9781282552630
9786612252983
6612252987
0815519710
9780815519713