Uniform Title IEEE transactions on semiconductor manufacturing (Online) Title IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council

Published New York, N.Y. : Institute of Electrical and Electronics Engineers Print began with v. 1, no. 1 (Feb. 1988)

Online access available from: IEEE Xplore    01 Jan. 1988- View Resource Record

Copies

Description Online resource Notes Also issued in printing Mode of access: World Wide Web Description based on print version record Latest issue consulted: Vol. 18, issue 3 (2005) (viewed IEEE website Sept. 21, 2005) Subject Semiconductors -- Design and construction -- Periodicals Form Electronic journal Author IEEE Components, Hybrids, and Manufacturing Technology Society IEEE Electron Devices Society IEEE Reliability Society IEEE Solid-State Circuits Council Institute of Electrical and Electronics Engineers LC no. 2005212499 ISSN 1558-2345 0894-6507

ABBREV TI IEEE trans. semicond. manuf. (Online) OTHER TI IEEE transactions on semiconductor manufacturing (Online) Other Titles Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing Transactions on semiconductor manufacturing Semiconductor manufacturing

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