Book Cover
E-journal

Uniform Title Materials science in semiconductor processing (Online)
Title Materials science in semiconductor processing
Published [Amsterdam] : Elsevier
Began with v. 1, no. 1 (Apr. 1998)
Online access available from:
ScienceDirect Freedom Collection    01 Jan. 1998-
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Copies

Description Online resource
Notes Mode of access: World Wide Web
Description based on: Vol. 1, no. 1 (Apr. 1998); title from contents screen (ScienceDirect, viewed Mar. 14, 2013)
Latest issue consulted: Vol. 16, no. 1 (Feb. 2013) (viewed Mar. 14, 2013)
Subject Semiconductors -- Periodicals
Integrated circuits -- Materials -- Periodicals
Form Electronic journal
LC no. 2013233138
ISSN 1873-4081
1369-8001
OTHER TI Materials science in semiconductor processing (Online)