| Description |
1 online resource (xxix, 275 pages) : illustrations |
| Series |
EMIS processing series ; no. 3 |
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EMIS processing series ; no. 3.
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| Contents |
Editor; Authors; Abbreviations; Introductory statements; Introduction; 1. Fundamentals of MEMS packaging; 2. Joining and bonding technologies; 3. Sealing technologies; 4. Packing of microsystems; 5. Automated microassembly; 6. Testing and design for test; 7. MEMS packaging in the life sciences; 8. RF and optical packaging in telecommunications and other applications; 9. Aerospace applications; Appendix 1: Glossary; Appendix 2: Other resources; Subject Index |
| Summary |
MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing. The Institution of Engineering and Technology is |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
|
English |
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Print version record |
|
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Subject |
Microelectromechanical systems.
|
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Microelectronic packaging.
|
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Micro-Electrical-Mechanical Systems
|
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Microelectromechanical systems
|
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Microelectronic packaging
|
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Bauelement
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Mikroelektronik
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Mikromechanik
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| Form |
Electronic book
|
| Author |
Hsu, Tai-Ran.
|
|
INSPEC (Information service)
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| ISBN |
9781849190626 |
|
1849190623 |
|
9781615839629 |
|
1615839623 |
|
1282275119 |
|
9781282275119 |
|
9786612275111 |
|
6612275111 |
|
