Title Advances in 3D integrated circuits and systems / by Hao Yu (NTU, Singapore), Chuan-Seng Tan (NTU, Singapore)

Published New Jersey : World Scientific, 2015 ©2016

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Description 1 online resource Series Series on emerging technologies in circuits and systems Series on emerging technologies in circuits and systems ; vol. 1. Contents Preface; 1. Introduction; 1.1 Thousand-core On-chip; 1.2 State-of-the-Art Many-core Microprocessors; 1.3 Memory-logic Integration; 1.3.1 2D Integration Challenges; 1.3.1.1 Scalability; 1.3.1.2 Channel Loss; 1.3.1.3 I/O Circuit Design; 1.3.1.4 Testing; 1.3.1.5 Thermal Management; 1.3.1.6 Power Management; 1.3.1.7 I/OManagement; 1.3.2 3D Integration; 1.3.3 2.5D Integration; 1.4 Organization of the Book; Part 1. Device Modeling; 2. Fabrication; 2.1 Introduction; 2.2 TSV Structure and Fabrication; 2.2.1 Structure Design; 2.2.1.1 Wafer Layout and Mask Design 2.2.1.2 Electrical Structure Design2.2.1.3 Thermal Structure Design; 2.2.1.4 Dummy TSV Blocks; 2.2.2 Fabrication Process; 2.2.2.1 Electrical Structure Fabrication Process; 2.2.2.2 Thermal Structure Fabrication Process; 2.2.3 Process Control and Optimization; 2.2.3.1 DRIE Si Etch; 2.2.3.2 Dielectric Liner Deposition; 2.2.3.3 Ta Barrier/Cu Seed Layer Deposition and Cu ECP; 2.2.3.4 Cu CMP; 2.3 TSV Electrical Characterization; 2.3.1 Measurement Setup; 2.3.2 Conventional PETEOS Oxide Liner; 2.3.2.1 Electrical CV Measurement; 2.3.2.2 Electrical IV Measurement; 2.3.3 Black Diamond Low-k Liner 2.3.3.1 Electrical CV Measurement2.3.3.2 Electrical IV Measurement; 2.3.4 Al2O3/Oxide Bi-layer Liner; 2.3.4.1 Electrical CV Measurement; 2.3.4.2 Electrical IV Measurement; 2.4 TSV Thermal Characterization Results; 2.4.1 Measurement Setup; 2.4.2 Cu-TSV Thermal Modeling; 2.4.3 Cu-TSV Induced Stress Modeling; 2.4.4 Cu-TSV Induced Stress Measurement by Micro-Raman Analysis; 2.5 TSI Structure and Fabrication; 2.5.1 Structure Design; 2.5.2 Fabrication Process; 2.6 Summary; 3. Device Model; 3.1 Introduction; 3.2 Nonlinear MOSCAP Model; 3.3 TSV Device Model; 3.3.1 Electrical Model 3.3.2 Thermal Model3.3.3 Mechanical Model; 3.3.4 Delay Model; 3.3.4.1 Electrical-Thermal Coupled Delay Model; 3.3.4.2 Electrical-Mechanical Coupled Delay Model ; 3.3.4.3 Electrical-Thermal-Mechanical Coupled Delay Model; 3.3.5 Power Model; 3.4 TSI Device Model; 3.4.1 Delay Model; 3.4.1.1 T-line Model; 3.4.1.2 Delay of T-line; 3.4.2 Power Model; 3.4.2.1 TSV and TSI Comparison; 3.4.2.2 Energy-efficiency Analysis; 3.5 Summary; Part 2. Physical Design; 4. Macromodel; 4.1 Introduction; 4.2 Power and Thermal Integrity; 4.3 Macromodeling; 4.3.1 Complexity Compression 4.3.1.1 Complexity Compression of States4.3.1.2 Complexity Compression of I/Os; 4.3.2 Parameterization; 4.4 Summary; 5. TSV Allocation; 5.1 Introduction; 5.2 Power Ground Design; 5.2.1 Problem Formulation; 5.2.2 Sensitivity based TSV Allocation; 5.3 Clock-treeDesign; 5.3.1 ProblemFormulation; 5.3.2 Sensitivity based TSV Allocation; 5.3.2.1 Reduction of Thermal Gradient; 5.3.2.2 Reduction of Stress Gradient; 5.3.2.3 Clock-skew Reduction; 5.4 Summary; 6. Testing; 6.1 Introduction; 6.2 3D IC Test; 6.2.1 System Architecture; 6.2.2 Problem Formulation Bibliography Includes bibliographical references and index Notes Print version record Subject Three-dimensional integrated circuits. TECHNOLOGY & ENGINEERING -- Mechanical. Three-dimensional integrated circuits Form Electronic book Author Tan, Chuan Seng ISBN 9789814699020 9814699020

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