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E-book

Title Laser precision microfabrication / Koji Sugioka, Michel Meunier, Alberto Piqué, editors
Published Heidelberg ; New York : Springer-Verlag, [2010]
©2010
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Description 1 online resource (xvi, 344 pages) : illustrations (some color)
Series Springer series in materials science ; 135
Springer series in materials science ; 135
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Lasers -- Industrial applications.
Microfabrication.
Form Electronic book
Author Sugioka, Kōji.
Meunier, Michel, 1956-
Piqué, Alberto.
LC no. 2010931868
ISBN 9783642105234
3642105238