Atomistic Models -- Lattice Gas Models and Kinetic Monte Carlo Simulations of Epitaxial Growth -- Cluster Diffusion and Island Formation on fcc(111) Metal Surfaces Studied by Atomic Scale Computer Simulations -- A Multiscale Study of the Epitaxial CVD of Si from Chlorosilanes -- Off-lattice Kinetic Monte Carlo Simulations of Strained Heteroepitaxial Growth -- Quasicontinuum Monte Carlo Simulation of Multilayer Surface Growth -- Step Flow Models -- to Step Dynamics and Step Instabilities -- A Finite Element Framework for Burton-Cabrera-Frank Equation -- Edge Diffusion in Phase-Field Models for Epitaxial Growth -- Discretisation and Numerical Tests of a Diffuse-Interface Model with Ehrlich-Schwoebel Barrier -- Islands in the Stream: Electromigration-Driven Shape Evolution with Crystal Anisotropy -- Simulation of Ostwald Ripening in Homoepitaxy -- Continuum Models -- Continuum Models for Surface Growth -- Configurational Continuum Modelling of Crystalline Surface Evolution -- On Level Set Formulations for Anisotropic Mean Curvature Flow and Surface Diffusion
Summary
The book provides a summary of recent developments in modeling epitaxial growth, with emphasis on multi-scale approaches and numerical methods. It presents a compact overview and can serve as an introduction for applied mathematicians, theoretical physicists and computational material scientists into this highly active interdisciplinary field of research
