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Book Cover
Author Suzuki, Kunihiro

Title Ion Implantation and Activation - Volume 3
Published Sharjah : Bentham Science Publishers, 2013


Description 1 online resource (212 pages)
Series Ion Implantation and Activation
Ion Implantation and Activation
Contents Cover; Title; EUL; Contents; Preface; Acknowledgement; Chapter 01; Chapter 02; Chapter 03; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Index
Summary Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory, Monte Carlo simulations, Edgeworth Polynomials and much more. This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling
Bibliography Includes bibliographical references and index
Notes English
Print version record
Subject Ion implantation.
Ion accelerators.
Ion accelerators
Ion implantation
Form Electronic book
ISBN 9781608057924