Title Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz

Published Sharjah : Bentham Science Publishers, 2013

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Description 1 online resource (363 pages) Contents Cover ; Title ; Contents ; About the Editors ; Foreword ; Preface ; List of Contributors ; Part 1 ; Chapter 01 ; Chapter 02 ; Chapter 03 ; Part 2 ; Chapter 04 ; Chapter 05 ; Chapter 06 ; Chapter 07 ; Chapter 08 ; Part 3 ; Chapter 09 ; Chapter 10 ; Chapter 11 ; Chapter 12 ; Author index ; Subject index Summary This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes Notes Print version record Subject Thin films. TECHNOLOGY & ENGINEERING -- Mechanical. Thin films Form Electronic book Author Martin, Nicolas. Fenker, Martin ISBN 9781608051564 1608051560

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