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Book Cover
E-book
Author Leach, Richard

Title Advances in Optical Surface Texture Metrology
Published Bristol : Institute of Physics Publishing, 2020

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Description 1 online resource (199 p.)
Series IOP Series in Emerging Technologies in Optics and Photonics Series
IOP Series in Emerging Technologies in Optics and Photonics Series
Contents Intro -- Preface -- Editor biography -- Richard Leach -- List of contributors -- Chapter 1 Terms and definitions -- 1.1 Introduction -- 1.2 General metrology terms and definitions -- 1.3 Surface terms and definitions -- References -- Chapter 2 Coherence scanning interferometry -- 2.1 Introduction -- 2.2 Applications -- 2.2.1 Surface finish characterisation -- 2.2.2 Measurement of highly sloped surfaces -- 2.2.3 Additive manufactured surfaces -- 2.2.4 Film measurement -- 2.2.5 Functional imaging -- 2.3 Technical advances -- 2.3.1 Surface reconstruction methods
2.3.2 Enhancement of the signal-to-noise ratio -- 2.3.3 Enhancement of measurement resolution and bandwidth -- 2.3.4 Pupil-plane imaging in CSI -- 2.3.5 Light sources -- 2.3.6 System design -- 2.4 Theoretical modelling of CSI -- 2.4.1 One-dimensional signal modelling -- 2.4.2 Two-dimensional imaging model and transfer function -- 2.4.3 Three-dimensional imaging model and transfer function -- 2.4.4 Image formation beyond the linear regime -- 2.5 Calibration and error correction -- 2.5.1 Noise -- 2.5.2 Linearity and amplification -- 2.5.3 Lateral distortion -- 2.5.4 Optical aberrations
2.5.5 Multiple materials -- 2.5.6 Steeply sloped surfaces -- 2.5.7 Instrument transfer function and resolution -- Acknowledgements -- References -- Chapter 3 Focus variation -- 3.1 Introduction to focus variation -- 3.1.1 Basic principles of focus variation -- 3.1.2 Algorithms for focus variation -- 3.2 Advances in focus variation -- 3.2.1 Measurement of smooth surfaces -- 3.2.2 Measurement of vertical walls and holes using vertical focus probing -- 3.2.3 In-process surface measurements -- 3.3 Case studies -- 3.3.1 Case study for measurement of smooth surfaces
3.3.2 Case study for vertical focus probing -- 3.3.3 Case study for in-process surface measurement -- 3.4 Conclusions and outlook -- References -- Chapter 4 Imaging confocal microscopy -- 4.1 Introduction -- 4.2 Confocal microscopy in the ISO 25178 framework -- 4.2.1 Laser scan, disc scan and microdisplay scan confocal microscopes -- 4.2.2 Calibration, adjustment, performance specifications and influence factors for imaging confocal microscopes -- 4.3 Structured illumination microscopy -- 4.4 Simultaneous confocal and focus variation in a single acquisition scan
4.5 Active illumination focus variation: the 'poor person's confocal microscopy' -- References -- Chapter 5 Non-scanning techniques -- 5.1 Introduction to non-scanning techniques -- 5.1.1 Scanning versus non-scanning techniques -- 5.1.2 Definition of a non-scanning technique -- 5.2 Wavelength scanning interferometry -- 5.2.1 Advances in wavelength scanning interferometry -- 5.3 Dispersed reference interferometry -- 5.3.1 Advances in dispersive reference interferometry -- 5.4 Chromatic confocal microscopy -- 5.4.1 Advances in chromatic confocal microscopy -- 5.5 Micro-scale fringe projection
Summary Latest advances in the science and application of optical instruments for the measurement of surface texture
Notes Description based upon print version of record
5.5.1 Advances in micro-scale FP
Subject Metrology.
Optical instruments.
Optical measurements.
optical instruments.
Form Electronic book
Author Su, Rong
Danzl, Reinhard
Helmli, Franz
Repitsch, Claudia
Zangl, Kerstin
Artigas, Roger
Feng, Xiaobing
Du, Zhengchun
Yang, Jian'guo
ISBN 9780750325288
0750325283