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Title Microsystems and nanotechnology / Zhaoying Zhou, Zhonglin Wang, Liwei Lin, [editors]
Published Beijing : Tsinghua University Press ; Berlin : Springer, 2012


Description 1 online resource (xxii, 1004 pages) : illustrations (some color)
Contents Part 1. Fundamentals of Microsystem and Nanotechnology. Information Electronics in the Nanotechnology Era / Zhi-Jian Li and Tian-Ling Ren -- Micro/Nano Fluidics Mechanics and Transducers / Chih-Ming Ho and Yu-Chong Tai -- Material Issues for Microsystems / Bingchu Cai -- Nanopiezotronics and Nanogenerators / Xudong Wang, Jun Zhou and Zhong Lin Wang -- Electron Transport in Single Molecules and Nanostructures / Aidi Zhao, Hui Zhang and J.G. Hou -- Part 2. Microsystem. Introduction to MEMS / Yu-Chong Tai -- Microelectromechanical Sensors / Shanhong Xia, Deyong Chen, Zhimei Qi, Xiuli He and Chunrong Peng, et al. -- MEMS Design / Yu-Chuan Su and Liwei Lin -- MEMS Processing and Fabrication Techniques and Technology--Silicon-Based Micromachining / Zhihong Li, Bo Liu and Wei Wang -- Optical MEMS and Nanophotonics / Ming C. Wu, Jui-che Tsai, Wibool Piyawattanametha and Pamela R. Patterson -- Introduction to MEMS Packaging / Mu Chiao, Yu-Ting Cheng and Liwei Lin -- Part 3. Nanotechnology. Advancement of Laser-Assisted and Roller-Based Nanoimprinting Technology / Yung-Chun Lee and Fei-Bin Hsiao -- The Application of STM and AFM in Nanoprocess and Fabrication / Yi Zhang, Jun Hu and Xudong Xiao -- Nanoscale Fabrication / Ampere A. Tseng, Zuliang Du, Andrea Notargiacomo and Shyankay Jou -- Integrated Nanotechnology Based on MEMS / Xinxin Li -- Part 4. Application Issues. Applications of Microelectro-Mechanical Systems / Wen H. Ko -- Microelectromechanical Sensor-Based System / Zhaoying Zhou, Rong Zhu, Xu Fu and Ganghua Zhang -- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry / Weijie Yun -- MEMS in Automobiles / Shih-Chia (Scott) Chang -- Biochip / Dafu Cui -- Micro/Nano Technologies and Their Biological and Medical Applications / Chun-Wei Huang and Gwo-Bin Lee -- Microfluidic Platforms for Lab-On-A-Chip Applications / Stefan Haeberle, Daniel Mark, Felix von Stetten and Roland Zengerle -- Part 5. Development and Prospects. Development and Prospects / Richard S. Muller, Wolfgang Menz, Masayoshi Esashi and Geoff Beardmore
Summary "Microsystems and Nanotechnology" presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts - the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects - and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology, Tsinghua University, and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA
Analysis nanotechnologie
materials science
Engineering (General)
Techniek (algemeen)
Notes "With 586 figures, 148 of them in color."
Bibliography Includes bibliographical references
Notes Print version record
Subject Microelectromechanical systems.
Science des matériaux.
Microelectromechanical systems.
Form Electronic book
Author Zhou, Zhaoying
Wang, Zhonglin
Lin, Liwei
ISBN 9783642182938