Title Materials for information technology : devices, interconnects and packaging / Ehrenfried Zschech, Caroline Whelan and Thomas Mikolajick (eds.)

Published London : Springer, ©2005

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Description 1 online resource (xix, 508 pages) : illustrations Series Engineering materials and processes Engineering materials and processes. Contents Recent Advances in Thin-film Deposition -- Molecular-beam Deposition of High-k Gate Dielectrics for Advanced CMOS -- LEPECVD -- A Production Technique for SiGe MOSFETs and MODFETs -- Thin-film Engineering by Atomic-layer Deposition for Ultra-scaled and Novel Devices -- Atomic-layer Deposited Barrier and Seed Layers for Interconnects -- Copper CVD for Conformal Ultrathin-film Deposition -- Pushing PVD to the Limits -- Recent Advances -- Surface Engineering Using Self-assembled Monolayers: Model Substrates for Atomic-layer Deposition -- Selective Airgaps: Towards a Scalable Low-k Solution -- Silicides -- Recent Advances and Prospects -- TEM Characterization of Strained Silicon -- Material Aspects of Non-Volatile Memories -- An Introduction to Nonvolatile Memory Technology -- Floating-dot Memory Transistors on SOI Substrate -- Ion-beam Synthesis of Nanocrystals for Multidot Memory Structures -- Scaling of Ferroelectric-based Memory Concepts -- Device Concepts with Magnetic Tunnel Junctions -- Phase-change Memories -- Amorphous-to-fcc Transition in GeSbTe Alloys -- Organic Nonvolatile Memories -- Materials for Interconnects -- Interconnect Technology -- Today, Recent Advances and a Look into the Future -- Dielectric and Scaling Effects on Electromigration for Cu Interconnects -- Texture and Stress Study of Sub-Micron Copper Interconnect Lines Using X-ray Microdiffraction -- Stress Modeling for Copper Interconnect Structures -- Conductivity Enhancement in Metallization Structures of Regular Grains -- Advanced Barriers for Copper Interconnects -- Synthesis and Characterization of Compounds Obtained by Crosslinking of Polymethylhydrosiloxane by Aromatic Rings -- Revealing the Porous Structure of Low-k Materials Through Solvent Diffusion -- Carbon Nanotube Via Technologies for Future LSI Interconnects -- Nickel Nanowires Obtained by Template Synthesis -- Materials for Assembly/Packaging -- The Importance of Polymers in Wafer-Level Packaging -- Electrically Conductive Adhesives as Solder Alternative: A Feasible Challenge -- The Role of Au/Sn Solder in Packaging -- Packaging Materials: Organic-Inorganic Hybrids for Millimetre-Wave Optoelectronics -- Wafer-Level Three-Dimensional Hyper-Integration Technology Using Dielectric Adhesive Wafer Bonding -- Advanced Materials Characterization -- Challenges to Advanced Materials Characterization for ULSI Applications -- Advanced Material Characterization by TOFSIMS in Microelectronic -- Electronic Properties of the Interface Formed by Pr2O3 Growth on Si(001), Si(111) and SiC(0001) Surfaces -- Materials Characterization by Ellipsometry -- Thermal Desorption Spectrometry as a Method of Analysis for Advanced Interconnect Materials -- Electron Backscatter Diffraction: Application to Cu Interconnects in Top-View and Cross Section -- X-ray Reflectivity Characterisation of Thin-Film and Multilayer Structures Summary "Materials for Information Technology is an up-to-date overview of current developments and R & D activities in the field of materials used for information technology with a focus on future applications." "The latest results in materials science and engineering as well as applications in the semiconductor industry are covered including the synthesis of blanket and patterned thin film materials, their properties, constitution, structure and microstructure. Computer modelling and analytical techniques to characterise thin film structures are also included to give a comprehensive survey of materials for the IT industry."--Jacket Notes Selected conference papers Bibliography Includes bibliographical references and index Notes Print version record Subject Microelectronics -- Materials -- Congresses Information technology -- Congresses Engineering. Electronics. Engineering Electronics engineering. TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- Integrated. TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General. Microelectronics -- Materials. Information technology. Ingénierie. Information technology Microelectronics -- Materials Genre/Form proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congrès. Form Electronic book Author Zschech, Ehrenfried Whelan, Caroline Mikolajick, Thomas ISBN 9781846282355 1846282357 1852339411 9781852339418 6610625468 9786610625468

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