| Description |
1 online resource (579 p.) |
| Contents |
Cover -- Title Page -- Copyright Page -- Dedication Page -- Contents -- Preface -- Symbols -- Part I Its Basis -- Chapter 1 Vacuum Technology -- 1.1 Units of Measurement -- References -- Chapter 2 Gas Properties -- 2.1 Kinetic Picture of a Gas -- 2.1.1 Velocity Distribution -- 2.1.2 Energy Distribution -- 2.1.3 Mean Free Path -- 2.1.4 Particle Flux -- 2.1.5 Monolayer Formation Time -- 2.1.6 Pressure -- 2.2 Gas Laws -- 2.2.1 Boyle's Law -- 2.2.2 Amontons' Law -- 2.2.3 Charles' Law -- 2.2.4 Dalton's Law -- 2.2.5 Avogadro's Law -- 2.2.6 Graham's Law -- 2.3 Elementary Gas Transport Phenomena |
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2.3.1 Viscosity -- 2.3.2 Thermal Conductivity -- 2.3.3 Diffusion -- 2.3.4 Thermal Transpiration -- References -- Chapter 3 Gas Flow -- 3.1 Flow Regimes -- 3.2 Flow Concepts -- 3.3 Continuum Flow -- 3.3.1 Orifice -- 3.3.2 Long Round Tube -- 3.3.3 Short Round Tube -- 3.4 Molecular Flow -- 3.4.1 Orifice -- 3.4.2 Long Round Tube -- 3.4.3 Short Round Tube -- 3.4.4 Irregular Structures -- 3.4.5 Components in Parallel and Series -- 3.5 Models Spanning Molecular and Viscous Flow -- References -- Chapter 4 Gas Release from Solids -- 4.1 Vaporization -- 4.2 Diffusion |
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4.2.1 Reduction of Outdiffusion by Vacuum Baking -- 4.3 Thermal Desorption -- 4.3.1 Zero Order -- 4.3.2 First Order -- 4.3.3 Second Order -- 4.3.4 Desorption from Real Surfaces -- 4.3.5 Outgassing Measurements -- 4.3.6 Outgassing Models -- 4.3.7 Reduction by Baking -- 4.4 Stimulated Desorption -- 4.4.1 Electron-Stimulated Desorption -- 4.4.2 Ion-Stimulated Desorption -- 4.4.3 Stimulated Chemical Reactions -- 4.4.4 Photo Desorption -- 4.5 Permeation -- 4.5.1 Atomic and Molecular Permeation -- 4.5.2 Dissociative Permeation -- 4.5.3 Permeation and Outgassing Units |
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4.6 Pressure Limitations During Pumping -- References -- Part II Measurement -- Chapter 5 Pressure Gauges -- 5.1 Direct Reading Gauges -- 5.1.1 Diaphragm and Bourdon Gauges -- 5.1.2 Capacitance Manometer -- 5.2 Indirect Reading Gauges -- 5.2.1 Thermal Conductivity Gauges -- 5.2.2 Spinning Rotor Gauge -- 5.2.3 Ionization Gauges -- References -- Chapter 6 Flow Meters -- 6.1 Molar Flow, Mass Flow, and Throughput -- 6.2 Rotameters and Chokes -- 6.3 Differential Pressure Devices -- 6.4 Thermal Mass Flow Technique -- 6.4.1 Mass Flow Meter -- 6.4.2 Mass Flow Controller |
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6.4.3 Mass Flow Meter Calibration -- References -- Chapter 7 Pumping Speed -- 7.1 Definition -- 7.2 Mechanical Pump Speed Measurements -- 7.3 High Vacuum Pump Speed Measurements -- 7.3.1 Methods -- 7.3.2 Gas and Pump Dependence -- 7.3.3 Approximate Speed Measurements -- 7.3.4 Errors -- References -- Chapter 8 Residual Gas Analyzers -- 8.1 Instrument Description -- 8.1.1 Ion Sources -- 8.1.2 Mass Filters -- 8.1.3 Detectors -- 8.2 Installation and Operation -- 8.2.1 Operation at High Vacuum -- 8.2.2 Operation at Medium and Low Vacuum -- 8.3 Calibration -- 8.4 Choosing an Instrument -- References |
| Notes |
Description based upon print version of record |
|
Chapter 9 Interpretation of RGA Data |
| Form |
Electronic book
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| Author |
Gessert, Timothy A
|
| ISBN |
9781394174140 |
|
1394174144 |
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