Book Cover
Author Zhongguo wei mi na mi ji shu xue hui. Conference (13th : 2011 : Changzhou (Jiangsu Sheng, China))

Title Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / edited by Xiaohao Wang
Published Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2012


Description 1 online resource : illustrations
Series Key engineering materials, 1013-9826 ; v. 503
Key engineering materials ; v. 503.
Contents Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane
New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone
Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization
Summary These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re
Bibliography Includes bibliographical references and indexes
Notes Print version record
Subject Nanotechnology -- Congresses
Microtechnology -- Congresses
SCIENCE -- Nanoscience.
Genre/Form Conference papers and proceedings
Form Electronic book
Author Wang, Xiaohao
ISBN 9783038136897