Description |
xix, 689 pages : illustrations (some colored) ; 26 cm + 1 CD-ROM (4 3/4 in.) |
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4 3/4 in |
Contents |
1. Introduction -- 2. The SEM and its modes of operation -- 3. Electron beam-specimen interactions -- 4. Image formation and interpretation -- 5. Special topics in scanning electron microscopy -- 6. Generation of X-rays in the SEM specimen -- 7. X-ray spectral measurement: EDS and WDS -- 8. Qualitative X-ray analysis -- 9. Quantitative X-ray analysis: the basics -- 10. Special topics in electron beam X-ray microanalysis -- 11. Specimen preparation of hard materials: metals, ceramics, rocks, minerals, microelectronic and packaged devices, particles, and fibers -- 12. Specimen preparation of polymer materials -- 13. Ambient-temperature specimen preparation of biological material -- 14. Low-temperature specimen preparation -- 15. Procedures for elimination of charging in nonconducting specimens |
Notes |
Previous ed.: New York : Plenum, 1992 |
Bibliography |
Includes bibliographical references and index |
Notes |
CD-ROM requires Microsoft Office to view documents (in PowerPoint, Word, and Excel formats); other formats used areTIFF, JPEG and PDF (requires Adobe Acrobat Reader) |
Subject |
Scanning electron microscopy.
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X-ray microanalysis.
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Author |
Goldstein, Joseph, 1939.
edition
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LC no. |
2002028276 |
ISBN |
0306472929 |
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