Title Fundamentals of microelectromechanical systems (MEMS) / Eun Sok, Kim

Published New York : McGraw-Hill, [2021]

Click on the following:
AccessEngineering

Copies

Description 1 online resource : illustrations Contents Cover -- Title Page -- Copyright Page -- Dedication -- Contents -- Preface -- Introduction -- 1 Basic Microfabrication -- 1.1 Introduction -- 1.2 Photolithography -- 1.3 Thermal Oxidation of Silicon -- 1.4 Silicon Doping -- 1.5 Vacuum Basics -- 1.6 Thin-Film Depositions -- 1.7 Mass Flow Sensing and Control -- 1.8 Electroplating of Metals -- 1.9 Soft Lithography and Its Derivative Technology -- 1.10 Wafer Bonding -- 1.11 Flip-Chip Bonding for Electrical Interconnect -- 1.12 Engineered Silicon Substrates -- References -- Questions and Problems -- 2 Micromachining -- 2.1 Bulk Micromachining -- 2.2 Surface Micromachining -- 2.3 Dry Micromachining -- 3 Transduction Principles -- 3.1 Electrostatic and Capacitive Transduction -- 3.2 Electromagnetic Transduction -- 3.3 Piezoelectric Transduction -- 3.4 Thermal Transduction -- References -- Questions and Problems -- 4 RF MEMS -- 4.1 Electromagnetic Wave Spectrum -- 4.2 Silicon Micromechanical Resonator -- 4.3 Acoustic Wave Resonators and Filters -- 4.4 Surface Acoustic Wave Filters -- 4.5 Tunable Capacitors -- 4.6 RF MEMS Switches -- References -- Questions -- 5 Optical MEMS -- 5.1 Micromirror Array for Projection Display -- 5.2 Micromirrors for Optical Fiber Communication -- References -- Questions -- 6 Mechanics and Inertial Sensors -- 6.1 Statics -- 6.2 Dynamics -- 6.3 MEMS Accelerometers -- 6.4 Vibratory Gyroscopes -- References -- Questions and Problems -- 7 Thin-Film Properties, SAW/BAW Sensors, Pressure Sensors, and Microphones -- 7.1 Thin-Film Residual Stress -- 7.2 Piezoelectric Films -- 7.3 Material Properties Expressed as Tensor -- References -- Questions and Problems -- 8 Microfluidic Systems and Bio- MEMS -- 8.1 Microchannels and Droplet Formation -- 8.2 Microvalves -- 8.3 Micropumps -- 8.4 Micromixers -- 8.5 Lab-on-Chip -- References -- Questions -- 9 Power MEMS -- 9.1 Electromagnetic Vibration Energy Harvesting -- 9.2 Piezoelectric Vibration Energy Harvesting -- 9.3 Power Generation from Vibration Associated with Human?s Walk -- References -- Questions and Problems -- 10 Electronic Noises, Interface Circuits, and Oscillators -- 10.1 Input Referred Noise -- 10.2 Voltage Amplifier versus Charge Amplifier for Piezoelectric Sensors -- 10.3 Electromagnetic Interference -- 10.4 Poles and Zeros -- 10.5 Design and Analysis of Oscillators Based on Bulk Acoustic-Wave Resonators -- References -- Questions and Problems -- Index Summary This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design Bibliography Includes bibliographical references and index Subject Semiconductors -- Design and construction -- Computer network resources Integrated circuits -- Design and construction -- Computer network resources Semiconductors -- Materials -- Computer network resources Integrated circuits -- Reliability -- Computer network resources Form Electronic book ISBN 9781264257584 1264257589

  Permalink