Uniform Title Journal of micro/nanolithography, MEMS, and MOEMS (Online) Title Journal of micro/nanolithography, MEMS, and MOEMS : JM³

Published [Bellingham, WA] : SPIE-The International Society of Optical Engineering, [2007-] ©2007- Began with: Vol. 6, issue 1 (Jan./Mar. 2007)

Online access available from: SPIE Digital Library    01 Apr. 2002- View Resource Record

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Description Online resource Prior Title Journal of microlithography, microfabrication, and microsystems Notes Mode of access: World Wide Web Description based on: Vol. 6, issue 1 (Jan./Mar. 2007); title from table of contents (SPIE website, viewed Sept. 15, 2011) Latest issue consulted: Vol. 12(2) (Apr./June 2013) (SPIE website, viewed Apr. 5, 2013) Subject Nanolithography -- Periodicals Microelectronics -- Periodicals Microlithography -- Periodicals Microfabrication -- Periodicals Form Electronic journal Author Society of Photo-Optical Instrumentation Engineers LC no. 2006214568 ISSN 1932-5134 1932-5150

ABBREV TI J. Micro/Nanolith. MEMS MOEMS (Online) OTHER TI Journal of micro/nanolithography, MEMS, and MOEMS (Online) Other Titles JM³ J. Micro/Nanolith. MEMS MOEMS

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