| Description |
1 online resource |
| Series |
Springer series in materials science ; volume 192 |
|
Springer series in materials science ; v. 192
|
| Contents |
1. Historical aspects of subsecond thermal processing -- 2. Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium -- 3. Metastable activation of dopants by solid phase epitaxial recrystallisation -- 4. Superconducting gallium implanted germanium -- 5. Structural changes in SiGe/Si layers induced by fast crystallization -- 6. Sub-nanosecond thermal spike induced nanostructuring of thin solid films under swift heavy ion (SHI) irradiation -- 7. Pulsed-laser-induced epitaxial growth of silicon for three-dimensional integrated circuits -- 8. Improvement of performance and cost of functional films using large area laser RTP -- 9. Pulsed laser dopant activation for semiconductors and solar cells -- 10. Formation of high-quality [mathematical symbol]m-order-thick poly-Si films on glass-substrates by flash lamp annealing -- 11. Millisecond-range liquid-phase processing of silicon-based hetero-nanostructures -- 12. Radiation thermometry -- sources of uncertainty during contactless temperature measurement -- 13. Millisecond annealing for semiconductor device applications -- 14. Low-cost and large-area electronics, roll-to-roll processing and beyond -- 15. Application of sub-second annealing for diluted ferromagnetic semiconductors |
| Summary |
This book offers selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Rapid thermal processing.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
|
Chimie.
|
|
Science des matériaux.
|
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Rapid thermal processing.
|
| Form |
Electronic book
|
| Author |
Skorupa, Wolfgang, editor
|
|
Schmidt, Heidemarie, editor
|
| ISBN |
9783319031316 |
|
3319031317 |
|
