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Title Subsecond annealing of advanced materials : annealing by lasers, flash lamps and swift heavy ions / Wolfgang Skorupa, Heidemarie Schmidt, editors
Published Cham : Springer, [2014]


Description 1 online resource
Series Springer series in materials science ; volume 192
Springer series in materials science ; v. 192
Contents 1. Historical aspects of subsecond thermal processing -- 2. Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium -- 3. Metastable activation of dopants by solid phase epitaxial recrystallisation -- 4. Superconducting gallium implanted germanium -- 5. Structural changes in SiGe/Si layers induced by fast crystallization -- 6. Sub-nanosecond thermal spike induced nanostructuring of thin solid films under swift heavy ion (SHI) irradiation -- 7. Pulsed-laser-induced epitaxial growth of silicon for three-dimensional integrated circuits -- 8. Improvement of performance and cost of functional films using large area laser RTP -- 9. Pulsed laser dopant activation for semiconductors and solar cells -- 10. Formation of high-quality [mathematical symbol]m-order-thick poly-Si films on glass-substrates by flash lamp annealing -- 11. Millisecond-range liquid-phase processing of silicon-based hetero-nanostructures -- 12. Radiation thermometry -- sources of uncertainty during contactless temperature measurement -- 13. Millisecond annealing for semiconductor device applications -- 14. Low-cost and large-area electronics, roll-to-roll processing and beyond -- 15. Application of sub-second annealing for diluted ferromagnetic semiconductors
Summary This book offers selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Rapid thermal processing.
Science des matériaux.
Rapid thermal processing.
Form Electronic book
Author Skorupa, Wolfgang, editor
Schmidt, Heidemarie, editor
ISBN 9783319031316