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Title Mechanical stress on the nanoscale : simulation, material systems and characterization techniques / edited by Margrit Hanbücken, Pierre Muller, Ralf B. Wehrspohn
Published Weinheim : Wiley-VCH, 2011
Online access available from:
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Description 1 online resource (380 pages)
Contents pt. 1. Fundamentals of stress and strain on the nanoscale -- pt. 2. Model systems with stress-engineered properties -- pt. 3. Characterization techniques of measuring stresses on the nanoscale
Summary A comprehensive overview of the current level of stress engineering on the nanoscale combining the theoretical fundamentals with simulation methods, model systems and characterization techniques
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Semiconductors -- Defects.
Semiconductors -- Reliability
TECHNOLOGY & ENGINEERING -- Material Science.
Semiconductors -- Defects
Semiconductors -- Reliability
Form Electronic book
Author Hanbücken, Margrit
Muller, Pierre, 1950-
Wehrspohn, Ralf B
LC no. 2012554564
ISBN 9783527410668
352741066X
9783527639564
352763956X
9783527639540
3527639543
3527639551
9783527639557
9781283379496
128337949X