| Description |
1 online resource |
| Series |
STP ; 1382 |
|
STP ; 1382
|
| Summary |
Annotation Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR |
| Notes |
Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif |
| Bibliography |
Includes bibliographical references |
| Subject |
Dielectrics -- Testing.
|
|
Gate array circuits -- Materials.
|
|
Integrated circuits -- Wafer-scale integration -- Reliability.
|
|
Semiconductor wafers -- Reliability.
|
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Silicon oxide films -- Testing.
|
| Genre/Form |
Conference papers and proceedings.
|
| Form |
Electronic book
|
| Author |
Brown, George A., 1937-
|
|
Gupta, D. C. (Dinesh C.)
|
|
ASTM International.
|
|
Conference on Gate Dielectric Integrity (1999 : San Jose, Calif.)
|
| ISBN |
0803126158 |
|
0803154313 |
|
9780803126152 |
|
9780803154315 |
|
