Title Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council

Published Washington, D.C. : National Academy Press, 1991

Click on the following:
EBSCO eBooks

Copies

Description 1 online resource (xii, 75 pages) : illustrations Notes Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL English Print version record digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL Subject Plasma engineering. Microelectronics -- Materials -- Effect of radiation on Surfaces (Technology) TECHNOLOGY & ENGINEERING -- Mechanical. Microelectronics -- Materials -- Effect of radiation on Plasma engineering Surfaces (Technology) Form Electronic book LC no. 91066812 ISBN 0585084637 9780585084633 1280203366 9781280203367 9786610203369 6610203369 0309583756 9780309583756

  Permalink