| Description |
1 online resource (199 pages) : illustrations |
| Series |
Defect and Diffusion Forum ; Vol. 241 |
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Diffusion and defect data. Pt. A, Defect and diffusion forum ; v. 241.
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| Contents |
Diffusion in Silicon -- A Seven-Year Retrospective; Table of Contents; Abstracts |
| Summary |
This collection of abstracts of experimental and theoretical papers on the subject of diffusion in silicon is intended to complement earlier volumes (DDF153-155) which covered the previous decade's work on the same topic. The abstracts are grouped according to the diffusing species in question. The latter comprise Ag, Al, As, Au, B, Ba, Be, C, Ca, Cl, Co, Cr, Cu, Er, F, Fe, Ge, H, He, Hf, In, Ir, K, Mg, Mn, Mo, N, Na, Nb, Ni, O, P, Pb, Pt, Rb, Sb, Se, Si, SiH3, Sn, Ti, V, Yb and Zn with regard to bulk diffusion, Ag, Au, Ba, Cl, Cu, Er, F, Ga, Ge, In, O, Pb, Sb, Si, SiH3, Sn and Y with regard to surface diffusion, H with regard to grain-boundary diffusion, and self-diffusion in liquid Si. In a separate section, diffusion in SiGe alloys is covered. The work on bulk diffusion here involves the diffusants: As, Au, B, Cu, Ge, H, Li, P, Sb or Si. Overall, this succinct up-to-date guide to the topic of diffusion in silicon will be useful to anyone involved in the theory, development or processing of silicon-based semiconductors |
| Bibliography |
Includes bibliographical references and indexes |
| Notes |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
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English |
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Online resource; title from PDF title page (ebrary, viewed November 01, 2013) |
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digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Subject |
Silicon.
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Silicon -- Analysis
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Diffusion.
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silicon.
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diffusion.
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Silicon -- Analysis
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Diffusion
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Silicon
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| Form |
Electronic book
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| Author |
Fisher, D. J.
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| ISBN |
9783038130314 |
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3038130311 |
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