Title IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP

Published Piscataway, N.J. : IEEE, [2002-] ©2002- 10th (Sept. 25-27, 2002)-

Online access available from: IEEE Xplore    01 Jan. 2001- View Resource Record

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Description Online resource Prior Title International Conference on Advanced Thermal Processing of Semiconductors. RTP ... (Online) Notes Title from PDF of title page (viewed August 10, 2004) 16th (Sept. 30 - Oct. 3, 2008) (IEEE Xplore, viewed Apr 16, 2009) Subject Semiconductors -- Heat treatment -- Congresses Rapid thermal processing -- Congresses Semiconductor doping -- Congresses Semiconductors -- Defects -- Congresses Form Electronic journal LC no. 2007242215 ISSN 1944-026X 1944-0251

ABBREV TI IEEE Int. Conf. Adv. Therm. Processing Semicond. (Online) OTHER TI IEEE International Conference on Advanced Thermal Processing of Semiconductors (Online) Other Titles RTP Advanced thermal processing of semiconductors Rapid Thermal Processing Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors

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