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Title
Journal of microlithography, microfabrication, and microsystems,
Published
[Bellingham, WA] : SPIE-The International Society for Optical Engineering, [2002-©2006]
©2002-©2006
Began with: Vol. 1, no. 1 (Apr. 2002), ceased with: Vol. 5 (4) (Oct./Dec. 2006)
Online access available from:
SPIE Digital Library
01 Jan. 2002 - 31 Dec. 2007
View Resource Record
Copies
Description
Online resource
Later Title
Journal of micro/nanolithography, MEMS, and MOEMS (Online)
Notes
Mode of access: World Wide Web
Vol. 1, numbers 1 (Apr. 2002), title from editorial (SPIE Digital Library site, viewed Apr 5, 2013)
Vol. 5 (4) (Oct./Dec. 2006) (SPIE Digital Library site, viewed Apr 5, 2013)
Subject
Microelectronics -- Periodicals
Microlithography -- Periodicals
Microfabrication -- Periodicals
Form
Electronic journal
Author
Society of Photo-Optical Instrumentation Engineers
LC no.
2013263115
ISSN
1537-1646
Other Titles
JM3
J. microlithogr., microfabr., microsyst
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